Authors:
OKIGAWA A
MAKABE T
SHIBAGAKI T
NAKANO N
PETROVIC ZL
KOGAWA T
ITOH A
Citation: A. Okigawa et al., ROBOT ASSISTED OPTICAL-EMISSION TOMOGRAPHY IN AN INDUCTIVELY-COUPLED PLASMA REACTOR, JPN J A P 1, 35(3), 1996, pp. 1890-1893
Authors:
OKIGAWA A
PETROVIC ZJ
TADOKORO M
MAKABE T
NAKANO N
ITOH A
Citation: A. Okigawa et al., DIAGNOSTICS OF A NONEQUILIBRIUM INDUCTIVELY-COUPLED PLASMAS IN ARGON, Applied physics letters, 69(18), 1996, pp. 2644-2646