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Results: 2
DEFLECTOR AND CORRECTION COIL CALIBRATIONS IN AN ELECTRON-BEAM BLOCK EXPOSURE SYSTEM
Authors: YAMADA A SAKAMOTO K YAMAZAKI S KOBAYASHI K SAGO S OONO M WATANABE H YASUDA H
Citation: A. Yamada et al., DEFLECTOR AND CORRECTION COIL CALIBRATIONS IN AN ELECTRON-BEAM BLOCK EXPOSURE SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3404-3408
ELECTRON-BEAM BLOCK EXPOSURE SYSTEM FOR A 256-M DYNAMIC RANDOM-ACCESSMEMORY
Authors: SAKAMOTO K FUEKI S YAMAZAKI S ABE T KOBAYASHI K NISHINO H SATOH T TAKEMOTO A OOKURA A OONO M SAGO S OAE Y YAMADA A YASUDA H
Citation: K. Sakamoto et al., ELECTRON-BEAM BLOCK EXPOSURE SYSTEM FOR A 256-M DYNAMIC RANDOM-ACCESSMEMORY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2357-2361
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