DEFLECTOR AND CORRECTION COIL CALIBRATIONS IN AN ELECTRON-BEAM BLOCK EXPOSURE SYSTEM

Authors
YAMADA A SAKAMOTO K YAMAZAKI S KOBAYASHI K SAGO S OONO M WATANABE H YASUDA H
Citation
A. Yamada et al., DEFLECTOR AND CORRECTION COIL CALIBRATIONS IN AN ELECTRON-BEAM BLOCK EXPOSURE SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3404-3408
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3404 - 3408
Database
ISI
SICI code
1071-1023(1994)12:6<3404:DACCCI>2.0.ZU;2-6