Authors:
BAKER D
OPDEBEECK M
BOTERMANS H
VANDENHOVE L
Citation: D. Baker et al., MANUFACTURABLE DUV LITHOGRAPHY PROCESSES FOR 0.25-MU-M TECHNOLOGY CONTACT AND VIA LAYERS, Microelectronic engineering, 35(1-4), 1997, pp. 517-522
Citation: Jh. Chen et al., MULTISLICE METHOD FOR LARGE BEAM TILT WITH APPLICATION TO HOLZ EFFECTS IN TRICLINIC AND MONOCLINIC CRYSTALS, Acta crystallographica. Section A, Foundations of crystallography, 53, 1997, pp. 576-589