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Results: 1-9 |
Results: 9
ANALYTIC REPRESENTATIONS OF THE DIELECTRIC FUNCTIONS OF CRYSTALLINE AND AMORPHOUS SI AND CRYSTALLINE GE FOR VERY LARGE-SCALE INTEGRATED DEVICE AND STRUCTURAL MODELING
Authors: LENG J OPSAL J CHU H SENKO M ASPNES DE
Citation: J. Leng et al., ANALYTIC REPRESENTATIONS OF THE DIELECTRIC FUNCTIONS OF CRYSTALLINE AND AMORPHOUS SI AND CRYSTALLINE GE FOR VERY LARGE-SCALE INTEGRATED DEVICE AND STRUCTURAL MODELING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1654-1657
BROAD-BAND SPECTRAL OPERATION OF A ROTATING-COMPENSATOR ELLIPSOMETER
Authors: OPSAL J FANTON J CHEN J LENG J WEI L UHRICH C SENKO M ZAISER C ASPNES DE
Citation: J. Opsal et al., BROAD-BAND SPECTRAL OPERATION OF A ROTATING-COMPENSATOR ELLIPSOMETER, Thin solid films, 313, 1998, pp. 58-61
ANALYTIC REPRESENTATIONS OF THE DIELECTRIC FUNCTIONS OF MATERIALS FORDEVICE AND STRUCTURAL MODELING
Authors: LENG J OPSAL J CHU H SENKO M ASPNES DE
Citation: J. Leng et al., ANALYTIC REPRESENTATIONS OF THE DIELECTRIC FUNCTIONS OF MATERIALS FORDEVICE AND STRUCTURAL MODELING, Thin solid films, 313, 1998, pp. 132-136
SIMULTANEOUS MEASUREMENT OF 6 LAYERS IN A SILICON-ON-INSULATOR FILM STACK USING VISIBLE NEAR IR SPECTROPHOTOMETRY AND SINGLE-WAVELENGTH BEAM PROFILE REFLECTOMETRY
Authors: LENG JM SIDOROWICH JJ SENKO M OPSAL J
Citation: Jm. Leng et al., SIMULTANEOUS MEASUREMENT OF 6 LAYERS IN A SILICON-ON-INSULATOR FILM STACK USING VISIBLE NEAR IR SPECTROPHOTOMETRY AND SINGLE-WAVELENGTH BEAM PROFILE REFLECTOMETRY, Thin solid films, 313, 1998, pp. 270-275
CHARACTERIZATION OF TITANIUM NITRIDE (TIN) FILMS ON VARIOUS SUBSTRATES USING SPECTROPHOTOMETRY, BEAM PROFILE REFLECTOMETRY, BEAM PROFILE ELLIPSOMETRY AND SPECTROSCOPIC BEAM PROFILE ELLIPSOMETRY
Authors: LENG JM CHEN J FANTON J SENKO M RITZ K OPSAL J
Citation: Jm. Leng et al., CHARACTERIZATION OF TITANIUM NITRIDE (TIN) FILMS ON VARIOUS SUBSTRATES USING SPECTROPHOTOMETRY, BEAM PROFILE REFLECTOMETRY, BEAM PROFILE ELLIPSOMETRY AND SPECTROSCOPIC BEAM PROFILE ELLIPSOMETRY, Thin solid films, 313, 1998, pp. 308-313
OPTICAL MONITORING OF CAPACITANCE IN HEMISPHERICAL GRAIN POLYCRYSTALLINE SILICON FOR ADVANCED DYNAMIC RANDOM-ACCESS MEMORY APPLICATION
Authors: LEE SB KIM JO RITZ KN OPSAL J OH HJ WOO SH SHIN SW HAN IK YANG HS
Citation: Sb. Lee et al., OPTICAL MONITORING OF CAPACITANCE IN HEMISPHERICAL GRAIN POLYCRYSTALLINE SILICON FOR ADVANCED DYNAMIC RANDOM-ACCESS MEMORY APPLICATION, Journal of the Electrochemical Society, 145(11), 1998, pp. 3935-3940
SIMULTANEOUS MEASUREMENT OF 6 LAYERS IN A SILICON-ON-INSULATOR FILM STACK USING SPECTROPHOTOMETRY AND BEAM PROFILE REFLECTOMETRY
Authors: LENG JM SIDOROWICH JJ YOON YD OPSAL J LEE BH CHA G MOON J LEE SI
Citation: Jm. Leng et al., SIMULTANEOUS MEASUREMENT OF 6 LAYERS IN A SILICON-ON-INSULATOR FILM STACK USING SPECTROPHOTOMETRY AND BEAM PROFILE REFLECTOMETRY, Journal of applied physics, 81(8), 1997, pp. 3570-3578
COMBINED OPTICAL METROLOGY MEASURES 6-LAYER DEVICES
Authors: LEE BH LENG JM OPSAL J
Citation: Bh. Lee et al., COMBINED OPTICAL METROLOGY MEASURES 6-LAYER DEVICES, R & D. Research and development, 38(13), 1996, pp. 17
MULTIPARAMETER MEASUREMENTS OF THIN-FILMS USING BEAM-PROFILE REFLECTOMETRY
Authors: FANTON JT OPSAL J WILLENBORG DL KELSO SM ROSENCWAIG A
Citation: Jt. Fanton et al., MULTIPARAMETER MEASUREMENTS OF THIN-FILMS USING BEAM-PROFILE REFLECTOMETRY, Journal of applied physics, 73(11), 1993, pp. 7035-7040
Risultati: 1-9 |