Authors: SCHMID P ORFERT M VOGT M

Citation: P. Schmid et al., PLASMA DEPOSITION OF SI-N AND SI-O PASSIVATION LAYERS ON 3-DIMENSIONAL SENSOR DEVICES, Surface & coatings technology, 98(1-3), 1998, pp. 1510-1517

Authors: RICHTER K ORFERT M DRESCHER K

Citation: K. Richter et al., ANISOTROPIC PATTERNING OF COPPER-LAMINATED POLYIMIDE FOILS BY PLASMA-ETCHING, Surface & coatings technology, 97(1-3), 1997, pp. 481-487