Authors: ABRAMOV AS VINOGRADOV AY KOSAREV AI SHUTOV MV SMIRNOV AS ORLOV KE

Citation: As. Abramov et al., ION-BOMBARDMENT OF AMORPHOUS-SILICON FILMS DURING PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION IN AN RF DISCHARGE, Technical physics, 43(2), 1998, pp. 180-187

Authors: SMIRNOV AS ORLOV KE

Citation: As. Smirnov et Ke. Orlov, SELF-CONSISTENT MODEL OF A LOW-PRESSURE RF CAPACITIVE DISCHARGE, Technical physics letters, 23(1), 1997, pp. 26-28

Authors: SMIRNOV AS ORLOV KE

Citation: As. Smirnov et Ke. Orlov, SELF-CORRELATED MODEL OF A HIGH-FREQUENCY VOLUME LOW-PRESSURE DISCHARGE, Pis'ma v Zurnal tehniceskoj fiziki, 23(1), 1997, pp. 39-45