Authors: SPITZER RC KAUFFMAN RL ORZECHOWSKI T PHILLION DW CERJAN C

Citation: Rc. Spitzer et al., SOFT-X-RAY PRODUCTION FROM LASER-PRODUCED PLASMAS FOR LITHOGRAPHY APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2986-2989