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Authors: DRUZ BL POLYAKOV VI KARABUTOV AV ROSSUKANYI NM RUKOVISHNICOV AI OSTAN E HAYES A FROLOV VD KONOV VI

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Authors: DRUZ B DISTEFANO S HAYES A OSTAN E WILLIAMS K WANG L

Citation: B. Druz et al., ION-BEAM DEPOSITION OF DIAMOND-LIKE CARBON FROM AN RF INDUCTIVELY-COUPLED CH4-PLASMA SOURCE, Surface & coatings technology, 86-7(1-3), 1996, pp. 708-714