Authors: NEO Y OTODA T SAGAE K MIMURA H YOKOO K

Citation: Y. Neo et al., EPITAXIAL-GROWTH OF ALUMINUM ON SILICON SUBSTRATES BY METALORGANIC MOLECULAR-BEAM EPITAXY USING DIMETHYL-ETHYLAMINE ALANE, JPN J A P 1, 37(5A), 1998, pp. 2602-2605