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Authors:
Ahmed, K
Ibok, E
Bains, G
Chi, D
Ogle, B
Wortman, JJ
Hauser, JR
Citation: K. Ahmed et al., Comparative physical and electrical metrology of ultrathin oxides in the 6to 1.5 nm regime, IEEE DEVICE, 47(7), 2000, pp. 1349-1354
Authors:
Ahmed, K
Ibok, E
Yeap, GCF
Xiang, Q
Ogle, B
Wortman, JJ
Hauser, JR
Citation: K. Ahmed et al., Impact of tunnel currents and channel resistance on the characterization of channel inversion layer charge and polysilicon-gate depletion of sub-20-angstrom gate oxide MOSFET's, IEEE DEVICE, 46(8), 1999, pp. 1650-1655