Authors: Matsuzawa, NN Oizumi, H Mori, S Irie, S Yano, E Okazaki, S Ishitani, A

Citation: Nn. Matsuzawa et al., Theoretical estimation of absorption coefficients of various polymers at 13 nm, MICROEL ENG, 53(1-4), 2000, pp. 671-674

Authors: Mori, S Shirayone, S Irie, S Matsuzawa, N Oizumi, H Yano, E Okazaki, S Miyafuji, A Watanabe, T Kinoshita, H Oshio, T Sugisaki, K

Citation: S. Mori et al., Prediction of resolution using wet-develop type single layer and dry-development process for EUV lithography, MICROEL ENG, 53(1-4), 2000, pp. 689-692

Authors: Matsuzawa, NN Oizumi, H Mori, S Irie, S Shirayone, S Yano, E Okazaki, S Ishitani, A Dixon, DA

Citation: Nn. Matsuzawa et al., Theoretical calculation of photoabsorption of various polymers in an extreme ultraviolet region, JPN J A P 1, 38(12B), 1999, pp. 7109-7113

Authors: Murai, K Oizumi, H Masaoka, T Fujishima, T Abiko, M Shiono, S Shimazaki, Y

Citation: K. Murai et al., Removal of cartilage rings of the graft and omentopexy for extended tracheal autotransplantation, ANN THORAC, 67(3), 1999, pp. 776-780

Authors: Murakami, K Oshino, T Kinoshita, H Watanabe, T Niibe, M Ito, M Oizumi, H Yamanashi, H

Citation: K. Murakami et al., Ring-field extreme ultraviolet exposure system using aspherical mirrors, JPN J A P 1, 37(12B), 1998, pp. 6750-6755