Authors:
Matsuzawa, NN
Oizumi, H
Mori, S
Irie, S
Yano, E
Okazaki, S
Ishitani, A
Citation: Nn. Matsuzawa et al., Theoretical estimation of absorption coefficients of various polymers at 13 nm, MICROEL ENG, 53(1-4), 2000, pp. 671-674
Authors:
Mori, S
Shirayone, S
Irie, S
Matsuzawa, N
Oizumi, H
Yano, E
Okazaki, S
Miyafuji, A
Watanabe, T
Kinoshita, H
Oshio, T
Sugisaki, K
Citation: S. Mori et al., Prediction of resolution using wet-develop type single layer and dry-development process for EUV lithography, MICROEL ENG, 53(1-4), 2000, pp. 689-692
Authors:
Matsuzawa, NN
Oizumi, H
Mori, S
Irie, S
Shirayone, S
Yano, E
Okazaki, S
Ishitani, A
Dixon, DA
Citation: Nn. Matsuzawa et al., Theoretical calculation of photoabsorption of various polymers in an extreme ultraviolet region, JPN J A P 1, 38(12B), 1999, pp. 7109-7113
Authors:
Murai, K
Oizumi, H
Masaoka, T
Fujishima, T
Abiko, M
Shiono, S
Shimazaki, Y
Citation: K. Murai et al., Removal of cartilage rings of the graft and omentopexy for extended tracheal autotransplantation, ANN THORAC, 67(3), 1999, pp. 776-780