Authors: Okuji, S Sakudo, N Hayashi, K Okada, M Onogawa, T Maesaka, T Nishiyama, Y Komatsu, K Toyoda, K Yashima, S Ishida, T Awazu, K

Citation: S. Okuji et al., Spatial distributions of ion-species in a large-volume inductively coupledplasma source, SURF COAT, 136(1-3), 2001, pp. 102-105

Authors: Okuji, S Sakudo, N Hayashi, K Fujimura, K Nishiyama, Y Toyoda, K Yashima, S Ishida, T

Citation: S. Okuji et al., Effect of microwave ferrite on the density distribution of microwave-superposed inductively coupled plasma, VACUUM, 59(2-3), 2000, pp. 686-692

Authors: Okada, M Sakudo, N Hayashi, K Ikenaga, N Okuji, S Onogawa, T Maesaka, T Nishiyama, Y Takahashi, M Ito, S Ito, H

Citation: M. Okada et al., Improvement of microwave ion source for higher B+ ion current, REV SCI INS, 71(2), 2000, pp. 713-715

Authors: Okuji, S Sakudo, N Hayashi, K Okada, M Onogawa, T Maesaka, T Nishiyama, Y Toyoda, K Yashima, S Ishida, T

Citation: S. Okuji et al., Large-area ion source combining microwaves with inductively coupled plasma, REV SCI INS, 71(2), 2000, pp. 716-718