Authors: Eremin, YA Stover, JC Orlov, NV

Citation: Ya. Eremin et al., Modeling scatter from silicon wafer features based on discrete sources method, OPT ENG, 38(8), 1999, pp. 1296-1304

Authors: Eremin, YA Orlov, NV

Citation: Ya. Eremin et Nv. Orlov, Study of scattering properties of defects of silicone wafers, OPT SPECTRO, 84(4), 1998, pp. 557-562