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Results: 2
Modeling scatter from silicon wafer features based on discrete sources method
Authors:
Eremin, YA Stover, JC Orlov, NV
Citation:
Ya. Eremin et al., Modeling scatter from silicon wafer features based on discrete sources method, OPT ENG, 38(8), 1999, pp. 1296-1304
Study of scattering properties of defects of silicone wafers
Authors:
Eremin, YA Orlov, NV
Citation:
Ya. Eremin et Nv. Orlov, Study of scattering properties of defects of silicone wafers, OPT SPECTRO, 84(4), 1998, pp. 557-562
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1-2
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