Citation: Mcm. Vandesanden et al., FAST DEPOSITION OF THIN AMORPHOUS FILMS USING AN EXPANDING THERMAL PLASMA, Pure and applied chemistry, 68(5), 1996, pp. 1155-1158
Authors:
MEULENBROEKS RFG
ENGELN RAH
BEURSKENS MNA
PAFFEN RMJ
VANDESANDEN MCM
VANDERMULLEN JAM
SCHRAM DC
Citation: Rfg. Meulenbroeks et al., THE ARGON-HYDROGEN EXPANDING PLASMA - MODEL AND EXPERIMENTS, Plasma sources science & technology, 4(1), 1995, pp. 74-85