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EFFECTS OF MICROSTRUCTURE ON THE PIEZORESISTANCE OF THIN POLYSILICON LAYERS
Authors:
LAVITSKAYA EN MARYAMOVA II DRUZHININ AA PANKOV YM
Citation:
En. Lavitskaya et al., EFFECTS OF MICROSTRUCTURE ON THE PIEZORESISTANCE OF THIN POLYSILICON LAYERS, Inorganic materials, 32(10), 1996, pp. 1016-1018
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