Authors:
DELLMANN L
ROTH S
BEURET C
PARATTE L
RACINE GA
LORENZ H
DESPONT M
RENAUD P
VETTIGER P
DEROOIJ NF
Citation: L. Dellmann et al., 2 STEPS MICROMOULDING AND PHOTOPOLYMER HIGH-ASPECT-RATIO STRUCTURING FOR APPLICATIONS IN PIEZOELECTRIC MOTOR COMPONENTS, Microsystem technologies, 4(3), 1998, pp. 147-150
Authors:
FAVRAT P
PARATTE L
BALLAN H
DECLERCQ MJ
DEROOIJ NF
Citation: P. Favrat et al., A 1.5-V-SUPPLIED CMOS ASIC FOR THE ACTUATION OF AN ELECTROSTATIC MICROMOTOR, IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2(3), 1997, pp. 153-160
Authors:
LORENZ H
PARATTE L
LUTHIER R
DEROOIJ NF
RENAUD P
Citation: H. Lorenz et al., LOW-COST TECHNOLOGY FOR MULTILAYER ELECTROPLATED PARTS USING LAMINATED DRY FILM RESIST, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 364-368
Citation: L. Paratte et Nf. Derooij, ELECTRODEPOSITED ELECTROSTATIC RIGID-ROTOR WOBBLE MOTORS ON SILICON, Sensors and actuators. A, Physical, 43(1-3), 1994, pp. 371-377