Authors: KOBEDA E MAZZEO NJ GAMBINO JP NG H PATTON GL WARNOCK JD BASAVAIAH S WHITE JF CRESSLER JD

Citation: E. Kobeda et al., FABRICATION OF TUNGSTEN LOCAL INTERCONNECT FOR VLSI BIPOLAR TECHNOLOGY, Journal of the Electrochemical Society, 140(10), 1993, pp. 3007-3013