Authors: CRESSWELL MW ALLEN RA LINHOLM LW GUTHRIE WF PENZES WB GURNELL AW

Citation: Mw. Cresswell et al., HYBRID OPTICAL-ELECTRICAL OVERLAY TEST STRUCTURE, IEEE transactions on semiconductor manufacturing, 10(2), 1997, pp. 250-255

Authors: CRESSWELL MW ALLEN RA LINHOLM LW ELLENWOOD CH PENZES WB TEAGUE EC

Citation: Mw. Cresswell et al., NEW TEST STRUCTURE FOR NANOMETER-LEVEL OVERLAY AND FEATURE-PLACEMENT METROLOGY, IEEE transactions on semiconductor manufacturing, 7(3), 1994, pp. 266-271