Authors: ZHANG L SHOHET JL DALLMANN D BOOSKE JH SPETH RR SHENAI K GOECKNER MJ KRUGER JB RISSMAN P TURNER JE PEREZALBUERNE E LEE S MEYYAPPAN N

Citation: L. Zhang et al., LOW-ENERGY SEPARATION BY IMPLANTATION OF OXYGEN STRUCTURES VIA PLASMASOURCE ION-IMPLANTATION, Applied physics letters, 65(8), 1994, pp. 962-964