Authors: SPATENKA P PETIG M WIESEMANN K SUHR H

Citation: P. Spatenka et al., LANGMUIR PROBE MEASUREMENTS DURING PLASMA-ACTIVATED CHEMICAL-VAPOR-DEPOSITION IN THE SYSTEM ARGON HYDROGEN/DICYCLOPENTADIENYLDIMETHYLHAFIUM/, Plasma chemistry and plasma processing, 15(3), 1995, pp. 371-381