Authors: ITO H KAMATA T ENGLAND J FOTHERINGHAM I PLUMB F CURRENT MI

Citation: H. Ito et al., THE PRECISION-IMPLANT-9500 PLASMA FLOOD SYSTEM - THE ADVANCED SOLUTION TO WAFER CHARGING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 30-33