Authors: CAPASSO C POMERENE A CHU W LEAVEY J LAMBERTI A HECTOR S OBERSCHMIDT J POL V

Citation: C. Capasso et al., X-RAY-INDUCED MASK CONTAMINATION AND PARTICULATE MONITORING IN X-RAY STEPPERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4336-4340

Authors: VISWANATHAN R SEEGER D BRIGHT A BUCELOT T POMERENE A PETRILLO K BLAUNER P AGNELLO P WARLAUMONT J CONWAY J PATEL D

Citation: R. Viswanathan et al., FABRICATION OF HIGH-PERFORMANCE 512KB SRAMS IN 0.25 MU-M CMOS TECHNOLOGY USING X-RAY-LITHOGRAPHY, Microelectronic engineering, 23(1-4), 1994, pp. 247-252

Authors: VISWANATHAN R SEEGER D BRIGHT A BUCELOT T POMERENE A PETRILLO K BLAUNER P AGNELLO P WARLAUMONT J CONWAY J PATEL D

Citation: R. Viswanathan et al., FABRICATION OF HIGH-PERFORMANCE 512K STATIC-RANDOM ACCESS MEMORIES IN0.25 MU-M COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGY USING X-RAY-LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2910-2919