Authors: MOISEEV YN PANOV VI SAVINOV SV PYAMINSKY IV

Citation: Yn. Moiseev et al., LOCAL PROBING INSTRUMENTATION AT ADVANCED TECHNOLOGIES CENTER - SURFACE AND FORCE DEVICES WITH TUNNELING SENSOR, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1690-1693