Authors: Fritze, M Palmateer, S Maki, P Knecht, J Chen, CK Astolfi, D Cann, S Denault, S Krohn, K Wyatt, PW

Citation: M. Fritze et al., Nanofabrication with deep-ultraviolet lithography and resolution enhancements, J VAC SCI B, 17(6), 1999, pp. 3310-3313