Authors:
Letzkus, F
Butschke, J
Irmscher, M
Reuter, C
Springer, R
Eder, S
Loschner, H
Eberhardt, R
Mohaupt, M
Ehrmann, A
Mathuni, J
Panzer, B
Struck, T
Citation: F. Letzkus et al., Reference plate manufacturing process for the ion projection lithography pattern lock system, MICROEL ENG, 57-8, 2001, pp. 213-218