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Citation: Aa. Parr et al., Depth profiling variously deposited LPCVD polysilicon films using Raman microscopy, SEMIC SCI T, 16(7), 2001, pp. 608-613

Authors: Parr, AA Gardiner, DJ Carline, RT King, DO Williams, GM

Citation: Aa. Parr et al., Structural variations in polysilicon, associated with deposition temperature and degree of anneal, J MATER SCI, 36(1), 2001, pp. 207-212