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Fabrication of SIS junctions for space borne submillimeter wave mixers using negative resist e-beam lithography
Authors:
Peron, I Pasturel, P Schuster, KF
Citation:
I. Peron et al., Fabrication of SIS junctions for space borne submillimeter wave mixers using negative resist e-beam lithography, IEEE APPL S, 11(1), 2001, pp. 377-380
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