Authors:
Sturans, MA
Hartley, JG
Pfeiffer, HC
Dhaliwal, RS
Groves, TR
Pavick, JW
Quickle, RJ
Clement, CS
Dick, GJ
Enichen, WA
Gordon, MS
Kendall, RA
Kostek, CA
Pinckney, DJ
Robinson, CF
Rockrohr, JD
Safran, JM
Senesi, JJ
Tressler, EV
Citation: Ma. Sturans et al., EL5: One tool for advanced x-ray and chrome on glass mask making, J VAC SCI B, 16(6), 1998, pp. 3164-3167