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Citation: Sj. Spector et al., Technique for rapid at-wavelength inspection of extreme ultraviolet mask blanks, J VAC SCI B, 17(6), 1999, pp. 3003-3008

Authors: Novembre, AE Blakey, MI Farrow, RC Kasica, RJ Knurek, CS Liddle, JA Peabody, ML

Citation: Ae. Novembre et al., Pattern processing results and characteristics for SCALPEL masks, MICROEL ENG, 46(1-4), 1999, pp. 271-274

Authors: Liddle, JA Johnson, JA Cirelli, R Mkrtchyan, MM Novembre, AE Peabody, ML

Citation: Ja. Liddle et al., Quantitation of latent resist images using photon tunneling microscopy, J VAC SCI B, 16(6), 1998, pp. 3651-3654