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Development of optical methods and equipment for controlling the manufacturing and parameters of semiconductor structures of nano- and microelectronics
Authors: Kovalev, VI Rukovishnikov, AI Perov, PI Rossukanyi, NM Avdeeva, LA
Citation: Vi. Kovalev et al., Development of optical methods and equipment for controlling the manufacturing and parameters of semiconductor structures of nano- and microelectronics, J COMMUN T, 44(11), 1999, pp. 1296-1300
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