Authors:
Gritsenko, VA
Wong, H
Xu, JB
Kwok, RM
Petrenko, IP
Zaitsev, BA
Morokov, YN
Novikov, YN
Citation: Va. Gritsenko et al., Excess silicon at the silicon nitride/thermal oxide interface in oxide-nitride-oxide structures, J APPL PHYS, 86(6), 1999, pp. 3234-3240
Authors:
Gritsenko, VA
Svitasheva, SN
Petrenko, IP
Wong, H
Xu, JB
Wilson, IH
Citation: Va. Gritsenko et al., Study of excess silicon at Si3N4 thermal SiO2 interface using ellipsometric measurements, J ELCHEM SO, 146(2), 1999, pp. 780-785