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Results:
1-3
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Results: 3
Residual thermomechanical stresses in thinned-chip assemblies
Authors:
Leseduarte, S Marco, S Beyne, E Van Hoof, R Marty, A Pinel, S Vendier, O Coello-Vera, A
Citation:
S. Leseduarte et al., Residual thermomechanical stresses in thinned-chip assemblies, IEEE T COMP, 23(4), 2000, pp. 673-679
Mapping the three-dimensional strain field around a microindentation on silicon using polishing and Raman spectroscopy
Authors:
Puech, P Pinel, S Jasinevicius, RG Pizani, PS
Citation:
P. Puech et al., Mapping the three-dimensional strain field around a microindentation on silicon using polishing and Raman spectroscopy, J APPL PHYS, 88(8), 2000, pp. 4582-4585
Mechanical lapping, handling and transfer of ultra-thin wafers
Authors:
Pinel, S Tasselli, J Bailbe, JP Marty, A Puech, P Esteve, D
Citation:
S. Pinel et al., Mechanical lapping, handling and transfer of ultra-thin wafers, J MICROM M, 8(4), 1998, pp. 338-342
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