Citation: Cr. Cho et al., Ferroelectric properties of sol-gel deposited Pb(Zr,Ti)O-3/LaNiO3 thin films on single crystal and platinized-Si substrates, MATER LETT, 38(2), 1999, pp. 125-130
Authors:
Cho, CR
Drinkwater, DE
Francis, LF
Polla, DL
Citation: Cr. Cho et al., Properties of Nb-doped lead scandium niobate titanate thin films prepared by a sol-gel method, MATER LETT, 38(2), 1999, pp. 136-140
Citation: Ys. Yoon et al., Influence of interface structure on chemical etching process for air gap of microelectromechanical system based on surface micromachining, JPN J A P 1, 37(12B), 1998, pp. 7129-7133
Authors:
Yoon, YS
Kim, JH
Schmidt, AM
Polla, DL
Wang, Q
Gladfelter, WL
Shin, YH
Citation: Ys. Yoon et al., RuO2/Ru electrode on Si3N4/Si substrate for microelectromechanical systemsdevices based on Pb(Zr1-xTix)O-3 film and surface micromachining, J MAT S-M E, 9(6), 1998, pp. 465-471