Authors: ELLISON A RADAMSON H TUOMINEN M MILITA S HALLIN C HENRY A KORDINA O TUOMI T YAKIMOVA R MADAR R JANZEN E

Citation: A. Ellison et al., WAFER WARPAGE, CRYSTAL BENDING AND INTERFACE PROPERTIES OF 4H-SIC EPI-WAFERS, DIAMOND AND RELATED MATERIALS, 6(10), 1997, pp. 1369-1373