Authors:
MUSIL J
RAJSKY A
BELL AJ
MATOUS J
CEPERA M
ZEMAN J
Citation: J. Musil et al., HIGH-RATE MAGNETRON SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2187-2191
Citation: J. Musil et al., OPTICAL-EMISSION SPECTRA FROM MICROWAVE OXYGEN PLASMA PRODUCED BY SURFATRON DISCHARGE, Czechoslovak journal of Physics, 43(5), 1993, pp. 533-540