Authors: HUANG DD QIN FG YAO ZY REN ZZ LIN LY GAO WB REN QY

Citation: Dd. Huang et al., HIGH-QUALITY CEO2 FILM GROWN ON SI(111) SUBSTRATE BY USING LOW-ENERGYDUAL-ION BEAM DEPOSITION TECHNOLOGY, Applied physics letters, 67(25), 1995, pp. 3724-3725