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EFFECT OF NATIVE POINT-DEFECTS ON MORPHOLOGY OF GETTERING CENTERS IN CZ-SILICON WAFERS
Authors:
ENISHERLOVA KL RUSAK TF MILVIDSKII MG REZNICK VJ
Citation:
Kl. Enisherlova et al., EFFECT OF NATIVE POINT-DEFECTS ON MORPHOLOGY OF GETTERING CENTERS IN CZ-SILICON WAFERS, Materials science & engineering. B, Solid-state materials for advanced technology, 36(1-3), 1996, pp. 120-124
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