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Results: 2
THICK POLYCRYSTALLINE SILICON FOR SURFACE-MICROMECHANICAL APPLICATIONS - DEPOSITION, STRUCTURING AND MECHANICAL CHARACTERIZATION
Authors: LANGE P KIRSTEN M RIETHMULLER W WENK B ZWICKER G MORANTE JR ERICSON F SCHWEITZ JA
Citation: P. Lange et al., THICK POLYCRYSTALLINE SILICON FOR SURFACE-MICROMECHANICAL APPLICATIONS - DEPOSITION, STRUCTURING AND MECHANICAL CHARACTERIZATION, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 674-678
DEPOSITION OF THICK DOPED POLYSILICON FILMS WITH LOW-STRESS IN AN EPITAXIAL REACTOR FOR SURFACE MICROMACHINING APPLICATIONS
Authors: KIRSTEN M WENK B ERICSON F SCHWEITZ JA RIETHMULLER W LANGE P
Citation: M. Kirsten et al., DEPOSITION OF THICK DOPED POLYSILICON FILMS WITH LOW-STRESS IN AN EPITAXIAL REACTOR FOR SURFACE MICROMACHINING APPLICATIONS, Thin solid films, 259(2), 1995, pp. 181-187
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