Authors:
WOODWORTH JR
RILEY ME
MILLER PA
NICHOLS CA
HAMILTON TW
Citation: Jr. Woodworth et al., ION DISTRIBUTION-FUNCTIONS IN INDUCTIVELY-COUPLED RADIO-FREQUENCY DISCHARGES IN ARGON-CHLORINE MIXTURES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 3015-3023
Authors:
WOODWORTH JR
RILEY ME
MILLER PA
HEBNER GA
HAMILTON TW
Citation: Jr. Woodworth et al., ION ENERGY AND ANGULAR-DISTRIBUTIONS IN INDUCTIVELY DRIVEN RADIO-FREQUENCY DISCHARGES IN CHLORINE, Journal of applied physics, 81(9), 1997, pp. 5950-5959
Authors:
WOODWORTH JR
RILEY ME
MEISTER DC
ARAGON BP
LE MS
SAWIN HH
Citation: Jr. Woodworth et al., ION ENERGY AND ANGULAR-DISTRIBUTIONS IN INDUCTIVELY-COUPLED RADIO-FREQUENCY DISCHARGES IN ARGON, Journal of applied physics, 80(3), 1996, pp. 1304-1311
Authors:
HARGIS PJ
GREENBERG KE
MILLER PA
GERARDO JB
TORCZYNSKI JR
RILEY ME
HEBNER GA
ROBERTS JR
OLTHOFF JK
WHETSTONE JR
VANBRUNT RJ
SOBOLEWSKI MA
ANDERSON HM
SPLICHAL MP
MOCK JL
BLETZINGER P
GARSCADDEN A
GOTTSCHO RA
SELWYN G
DALVIE M
HEIDENREICH JE
BUTTERBAUGH JW
BRAKE ML
PASSOW ML
PENDER J
LUJAN A
ELTA ME
GRAVES DB
SAWIN HH
KUSHNER MJ
VERDEYEN JT
HORWATH R
TURNER TR
Citation: Pj. Hargis et al., THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES, Review of scientific instruments, 65(1), 1994, pp. 140-154
Citation: Ga. Hebner et al., ELECTRIC-FIELDS IN HIGH-FREQUENCY PARALLEL-PLATE HELIUM DISCHARGES, Journal of applied physics, 76(7), 1994, pp. 4036-4044
Authors:
RILEY ME
GREENBERG KE
HEBNER GA
DRALLOS P
Citation: Me. Riley et al., THEORETICAL AND EXPERIMENTAL-STUDY OF LOW-TEMPERATURE, CAPACITIVELY COUPLED, RADIOFREQUENCY HELIUM PLASMAS, Journal of applied physics, 75(6), 1994, pp. 2789-2798