Authors:
KIM WM
LEE SK
CHEONG B
KIM SG
KIM OS
RO JS
Citation: Wm. Kim et al., EFFECT OF ION IRRADIATION ON INTERNAL-STRESS OF AMORPHIC CARBON-FILMSPRODUCED BY PULSED-LASER, Thin solid films, 270(1-2), 1995, pp. 237-242
Citation: Js. Ro et al., MECHANISM OF ION-BEAM-INDUCED DEPOSITION OF GOLD, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 73-77