Authors: SUEDA M KOBAYASHI T ROKKAKU T OGAWA M WATANABE T MORIMOTO S

Citation: M. Sueda et al., HIGH-RATE DEPOSITION OF CBN FILMS BY ION-BEAM-ASSISTED VAPOR-DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3287-3294

Authors: SUEDA M KOBAYASHI T TSUKAMOTO H ROKKAKU T MORIMOTO S FUKAYA Y YAMASHITA N WADA T

Citation: M. Sueda et al., FUNDAMENTAL RESEARCH ON THE DEPOSITION OF CUBIC BORON-NITRIDE FILMS ON CURVED SUBSTRATES BY ION-BEAM-ASSISTED VAPOR-DEPOSITION, Thin solid films, 228(1-2), 1993, pp. 97-99

Authors: SUEDA M KOBAYASHI T ROKKAKU T FUKAYA Y WADA T YAMASHITA N YOSHIOKA H MORIMOTO S

Citation: M. Sueda et al., FORMATION OF CBN FILMS BY ION-BEAM-ASSIST ED DEPOSITION, Nippon Kinzoku Gakkaishi, 57(8), 1993, pp. 932-937