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VANHOVE JM
CHOW PP
WOWCHAK AM
KLAASSEN JJ
ROSAMOND MF
CROSWELL DR
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Authors:
VANHOVE JM
CHOW PP
ROSAMOND MF
CARPENTER GL
CHOW LA
Citation: Jm. Vanhove et al., CARBON DOPING BY A COMPACT ELECTRON-BEAM SOURCE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 1200-1202