Authors:
DUBOWSKI JJ
ROSENQUIST BE
LOCKWOOD DJ
LABBE HJ
ROTH AP
LACELLE C
DAVIES M
BARBER R
MASON B
SPROULE GI
Citation: Jj. Dubowski et al., STRUCTURE DAMAGE IN REACTIVE-ION AND LASER ETCHED INP GAINAS MICROSTRUCTURES/, Journal of applied physics, 78(3), 1995, pp. 1488-1491