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FABRICATION OF EXTREMELY THIN SILICON-ON-INSULATOR FOR FULLY-DEPLETEDCMOS APPLICATIONS
Authors:
BINDAL A ROVEDO N RESTIVO J GALLI C OGURA S
Citation:
A. Bindal et al., FABRICATION OF EXTREMELY THIN SILICON-ON-INSULATOR FOR FULLY-DEPLETEDCMOS APPLICATIONS, Thin solid films, 232(1), 1993, pp. 105-109
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