Authors:
ALLEN LP
FARLEY M
PURSER KH
RYDING G
SMICK TH
Citation: Lp. Allen et al., IN-SITU RUTHERFORD BACKSCATTERING DESIGN FOR EARLY SIMOX-SOI METALLICSCREENING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 118(1-4), 1996, pp. 782-786