MANUFACTURING TECHNOLOGY FOR 200MM SIMOX WAFERS

Authors
GUERRA M CORDTS B SMICK T DOLAN R KRULL W RYDING G ALLES M ANC M
Citation
M. Guerra et al., MANUFACTURING TECHNOLOGY FOR 200MM SIMOX WAFERS, Microelectronic engineering, 22(1-4), 1993, pp. 351-354
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
22
Issue
1-4
Year of publication
1993
Pages
351 - 354
Database
ISI
SICI code
0167-9317(1993)22:1-4<351:MTF2SW>2.0.ZU;2-#