Authors: Gotszalk, T Radojewski, J Grabiec, PB Dumania, P Shi, F Hudek, P Rangelow, IW

Citation: T. Gotszalk et al., Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy, J VAC SCI B, 16(6), 1998, pp. 3948-3953