Authors:
Kim, JS
Rao, MVVS
Cappelli, MA
Sharma, SP
Meyyappan, M
Citation: Js. Kim et al., Mass spectrometric and Langmuir probe measurements in inductively coupled plasmas in Ar, CHF3/As and CHF3/Ar/O-2 mixtures, PLASMA SOUR, 10(2), 2001, pp. 191-204
Citation: Mvvs. Rao et al., Kinetic-energy distributions of positive and negative ions in Townsend discharges in oxygen, PHYS REV E, 59(4), 1999, pp. 4565-4572