Authors:
Alberti, A
La Via, F
Grimaldi, MG
Ravesi, S
Citation: A. Alberti et al., Effect of lateral dimensional scaling on the thermal stability of thin CoSi2 layers reacted on polycrystalline silicon, J VAC SCI B, 18(2), 2000, pp. 717-720
Citation: A. Alberti et al., Effect of lateral dimensional scaling on the thermal stability of poly-CoSi2 reacted on Si (001), MICROEL ENG, 50(1-4), 2000, pp. 179-186